Pulse Electron Deposition
The Pulsed Electron Deposition (PED) technique enables thin films of materials to be deposited on substrates for semiconductor manufacturing. This method is now being used as an alternative to Pulsed Laser Deposition, with the benefit of lower system costs. The 20kV output ALE-202A power supply, with a 2200 J/s peak charging rate, was chosen for this application because of its excellent pulse to pulse repeatability and TDK-Lambda’s, and three 7,500W TX plug in power supplies.
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