Application Solutions

Vacuum Sputter Deposition

Posted by Dulcie on January 4, 2013
Genesys™ Programmable Power Supply

Sputtering is used extensively in the semiconductor industry to deposit thin films of various materials in integrated circuit (IC) processing. This technique is also used during the fabrication of CDs and DVDs, as well as optical waveguides and photovoltaic cells. In order to control the sputter gun precisely, an equipment manufacturer uses the comprehensive feature set provided by Genesys™ programmable DC power supply from TDK-Lambda.